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JMP如何用Contour Profiler画出圆形晶圆的cmp thickness wafer map profile?
By default JMP可以用contour profiler 来plot wafer thickness profile,可是wafer map不会是圆形的。 4 j% A! r0 V; K$ @9 k0 ~
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我找到以下的script example可以画成圆形的wafermap,可是这个example script是encrypted的
8 l. r&&X7 C&&e/ d4 I
哪位高人可以提点以下，要如何才可象这个example一样是圆形的啊？
其他软件plot wafer map的我也有，只是要学习如何利用jmp来plot.4 U) |! m, N7 Q" d) j7 R9 u* ?3 J; E
你要的解加密的script
//-e6.0.2' g5 ~5 l+ U0 c7 s
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二樓的大哥真的是高手﹗
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